查看完整版本: Scientists develop low-cost recipe for patterning microchips

Scientists develop low-cost recipe for patterning microchips

[size=5][b]Scientists develop low-cost recipe for patterning microchips[/b][/size]

[b]【纳米科技世界快讯】Creating ultrasmall grooves on microchips -- a key part of many modern technologies -- is about to become as easy as making a sandwich, using a new process invented by Princeton engineers.[/b]

[img]http://img296.imageshack.us/img296/483/5035web24bc8d6zy0.jpg[/img]
[i]Fracture-induced structuring results in the self-formation of periodic lines, or gratings, separated by as few as 60 nanometers -- less than one ten-thousandth of a millimeter -- on microchips. First, a thin polymer film is painted onto a rigid plate, such as a silicon wafer. Then, a second plate is placed on top, creating a polymer sandwich that is heated to ensure adhesion. Finally, the two plates are pried apart. As the film fractures, it automatically breaks into two complementary sets of nanoscale gratings, one on each plate. Credit: Stephen Chou/Princeton University[/i]

The simple, low-cost technique results in the self-formation of periodic lines, or gratings, separated by as few as 60 nanometers -- less than one ten-thousandth of a millimeter -- on microchips. Features of this size have many uses in optical, biological and electronic devices, including the alignment of liquid crystals in displays. The researchers will publish their findings Sept. 2 in the online version of Nature Nanotechnology.

“It’s like magic,” said electrical engineer Stephen Chou, the Joseph C. Elgin Professor of Engineering. “This is a fundamentally different way of making nanopatterns.”

The process, called fracture-induced structuring, is as easy as one-two-three. First, a thin polymer film is painted onto a rigid plate, such as a silicon wafer. Then, a second plate is placed on top, creating a polymer sandwich that is heated to ensure adhesion. Finally, the two plates are pried apart. As the film fractures, it automatically breaks into two complementary sets of nanoscale gratings, one on each plate. The distance between the lines, called the period, is four times the film thickness.

The ease of creating these lines is in marked contrast to traditional fabrication methods, which typically use a beam of electrons, ions, or a mechanical tip to “draw” the lines into a surface. These methods are serial processes which are extremely slow and therefore only suitable for areas one square millimeter or smaller. Other techniques suitable for larger areas have difficulties achieving small grating periods or producing a high yield, or they require complex and expensive processes. Fracture-induced structuring is not only simple and fast, but it enables patterning over a much larger area. The researchers have already demonstrated the ability of the technique to create gratings over several square centimeters, and the patterning of much large areas should be possible with further optimization of the technique.

“It’s remarkable – and counterintuitive – that fracturing creates these regular patterns,” said chemical engineering professor and dean of Princeton’s graduate school William Russel. Russel and his graduate student Leonard Pease III teamed with Chou and his graduate students Paru Deshpande and Ying Wang to develop the technique.

A patent application has been filed on the process, which the researchers say is economically feasible for large-scale use in industry. The gratings generated by the fracturing process also could be used in conjunction with existing patterning methods. For example, the nanoimprinting method invented by Chou in the 1990s can use the gratings generated by fracture-induced structuring to create a mold that enables mass duplication of patterns with high precision at low cost.

As with many scientific discoveries, the fracture-induced structuring process was happened upon accidentally. Graduate students in the Chou and Russel groups were trying to use instabilities in various molten polymers (in essence, melted plastic) to create patterns when they discovered instead that fracturing a solid polymer film can generate the gratings automatically. The team seized upon this finding and established the optimal conditions for grating formation.

Next, the group plans to explore the fundamental science behind the process and investigate the interplays of various forces at such a small scale, according to Chou.

“And, we want to push the limit and see how small we can go,” he said.

Source: Princeton University, Engineering School

[b][color=DarkGreen]Periodic nanostructures can be made over large areas using a simple low-cost method in which a thin polymer film is sandwiched between two flat plates that are then pulled apart.[/color][/b]

[b]Self-formation of sub-60-nm half-pitch gratings with large areas through fracturing[/b]

Nature Nanotechnology Published online: 2 September 2007 | doi:10.1038/nnano.2007.264

[b]Nanogratings: Breaking up is a grating experience[/b]

Nature Nanotechnology Published online: 2 September 2007 | doi:10.1038/nnano.2007.279

more information, via:[url=http://www.nature.com/nnano/journal/vaop/ncurrent/full/nnano.2007.279.html] :website [/url]

请问楼主，能下载到全文吗？

请问楼主，能下载到全文吗？
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普林斯顿科学家发明低成本的微光栅制造技术

据教育部科技发展中心2007年9月5日报道：在微芯片上制造凹槽—这一许多现代技术中的关键部分—将因为普林斯顿科学家们的发明而变得像制作三明治一样简单。

    这项简单、低成本的技术能够自然形成周期排布的线（即光栅）。线之间的距离可以小至60纳米，该尺寸形貌在光学、生物学和电子学中有很多应用，包括排列显示器中的液晶。

    这个被称为“破裂诱导成型”的过程非常简单。首先，把聚合物薄膜涂在一个硬片（比如硅晶片）上。然后，在上面加另一个硬片，形成一个聚合物三明治结构，并且加热以保证粘附。最后，把两个硬片分开。随着薄膜的破裂，会自动地在两个硬片上形成两个互补的纳米光栅。其中光栅的线距等于薄膜厚度的4倍。

    这种微凹槽的简单制作方法和传统加工方法相比具有极大优势。传统方法是使用电子束、离子或者机械针尖来在表面刻出这些线，制作速度缓慢，因此只适合应用于 1平方毫米或更小的表面。另一些适合大面积应用的技术，或者很难制造出很小的光栅周期，或者很难提高产量，或者需要复杂且昂贵得设备。这种“破裂诱导成型”技术不仅简单快速，而且能够在较大面积上使用。研究人员已经在几平方厘米的面积上示范了这种技术，相信优化后将能够在更大面积上使用。

    这个小组下一步计划探求这一过程背后的基本原理，并研究在这一尺度下各种力之间的相互作用。

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