nanochip 2008-05-09 12:40
Lithographic alignment to site-controlled quantum dots for device integration
[b]Appl. Phys. Lett. [/b]92, 183101 (2008); DOI:10.1063/1.2920189 Published 5 May 2008
We report on a scalable fabrication technology for devices based on single quantum dots (QDs) which combines site-controlled growth of QDs with an accurate alignment procedure. Placement of individual QDs and corresponding device structures with a standard deviation of around 50 nm from the target position was achieved. The potential of the technology is demonstrated by fabricating arrays of mesas, each containing one QD at a defined position. The presence of single, optically active QDs in the mesas was probed by scanning microphotoluminescence of the mesa arrays. ©2008 American Institute of Physics
[url]http://link.aip.org/link/?APPLAB/92/183101/1[/url] :victory: